ASQ - Statistics Division

A Holistic Approach to the Design of Experiments – Part 2 – Mini Paper Taken from the Summer 1993 Newsletter

Abstract: Part II of this paper gives an application of design of experiments for a semiconductor resist optimization study. In particular, a Box-Benhken RSM Design for three variables was chosen. The paper gives a broad overview of the steps of designing and analyzing an experiment, but data and some details have been omitted.

Keywords: Designed experiments - Box-Behnken response surface method (RSM) design

Already a member? Access this Content

You will need Adobe Reader to view this PDF document.
Download the free Reader from Adobe

  • Print this page
  • Save this page

Average Rating


Out of 0 Ratings
Rate this item

View comments
Add comments
Comments FAQ

ASQ News