Silicon Crystal Termination--An Application of the Analysis of Means for Percent Defective Data

Article

Tomlinson, Lowell H.; Lavigna, Robert J.   (1983, ASQC)   Western Electric Company

Journal of Quality Technology    Vol. 15    No. 1
QICID: 5445    January 1983    pp. 26-32
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Article Abstract

The late Dr. Ellis R. Ott has erected his own memorial by providing quality control practitioners with a useful tool for the direct graphical comparison of means. This paper discusses the application of his technique to the first processing step in semiconductor manufacturing. In particular, a simple dichotomous parameter is selected for analysis to demonstrate that significant gains can be realized when this appealing statistical procedure is coupled with quality team involvement.

Keywords

Analysis Of Means (ANOM),Attribute data,Crystal growing,Termination


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